Zone-controlled rare-earth oxide ald and cvd coatings

ABSTRACT

Disclosed herein is a rare-earth oxide coating on a surface of an article with one or more interruption layers to control crystal growth and methods of its formation. The coating may be deposited by atomic layer deposition and/or by chemical vapor deposition. The rare-earth oxides in the coatings disclosed herein may have an atomic crystalline phase that is different from the atomic crystalline phase or the amorphous phase of the one or more interruption layers.

RELATED APPLICATIONS

This patent application is a divisional application of U.S. patentapplication Ser. No. 15/947,402 filed on Apr. 6, 2018. application Ser.No. 15/947,402 is incorporated by reference herein.

TECHNICAL FIELD

Embodiments disclosed herein relate, in general, to rare-earth coatingsfor articles with an interruption layer, and in particular to yttriumoxide coatings with one or more interruption layers for controlling theyttrium oxide grain growth.

BACKGROUND

Various manufacturing processes expose semiconductor process chambercomponents to high temperatures, high energy plasma, a mixture ofcorrosive gases, high stress, and combinations thereof. These extremeconditions may erode and/or corrode the chamber components, increasingthe chamber components' susceptibility to defects.

Protective coatings used for reducing defects on chamber components dueto harsh processing conditions are typically deposited on chambercomponents. Protective coatings may be deposited by a variety oftechniques, including but not limited to, thermal spray, sputtering, ionassisted deposition (IAD), plasma spray, evaporation techniques, atomiclayer deposition, chemical vapor deposition, and so on. Some of thesetechniques may generate protective coatings with abnormally largecrystal grains. Abnormally large crystal grains may increase theprotective coating's surface roughness and provide a pathway fordiffusion of chemicals through possible cracks between the grains orthrough grain boundaries.

SUMMARY

In an example embodiment, disclosed herein is an article comprising aplasma resistant protective coating on a surface of the article. Theplasma resistant protective coating may comprise a stack of alternatinglayers of crystalline rare-earth oxide layers and crystalline oramorphous metal oxide layers. The first layer in the stack ofalternating layers may be a crystalline rare-earth oxide layer. Thecrystalline rare-earth oxide layers may have a thickness of about500-5000 angstroms. In embodiments where the metal oxide layers arecrystalline, each of the metal oxide layers may have an atomiccrystalline phase different from the crystalline phase of the rare-earthoxide layer and each metal oxide layer may have a thickness of about1-500 angstroms. The crystalline or amorphous metal oxide layers mayinhibit grain growth in the crystalline yttrium oxide layers.

In an example embodiment, disclosed herein is a method comprisingdepositing a plasma resistant protective coating onto a surface of anarticle using an atomic layer deposition (ALD) process or a chemicalvapor deposition (CVD) process. Depositing the plasma resistantprotective coating may comprise depositing a crystalline rare-earthoxide layer using ALD or CVD. Depositing the plasma resistant protectivecoating may further comprise depositing a crystalline or amorphous metaloxide layer on the crystalline rare-earth oxide layer using ALD or CVD.In embodiments where the metal oxide layer is crystalline, the metaloxide layer may have an atomic crystalline phase different from thecrystalline phase of the crystalline rare-earth oxide.

In an example embodiment, disclosed herein is a method comprisingdepositing a plasma resistant protective coating onto a surface of anarticle using an atomic layer deposition (ALD) process or a chemicalvapor deposition (CVD) process. Depositing the plasma resistantprotective coating may comprise depositing a stack of alternating layersof crystalline yttrium oxide layers and crystalline or amorphous metaloxide layers. Each of the crystalline yttrium oxide layers may have acubic phase and a thickness of about 500-5000 angstroms. In embodimentswhere the metal oxide layers are crystalline, the metal oxide layers mayhave an atomic crystalline phase different from the cubic phase of thecrystalline yttrium oxide and each of the metal oxide layers may have athickness of about 1-500 angstroms. The first layer in the stack ofalternating layers may be a crystalline yttrium oxide layer. Thecrystalline or amorphous metal oxide layers may inhibit grain growth inthe crystalline yttrium oxide layers.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present invention are illustrated by way of example,and not by way of limitation, in the figures of the accompanyingdrawings in which like references indicate similar elements. It shouldbe noted that different references to “an” or “one” embodiment in thisdisclosure are not necessarily to the same embodiment, and suchreferences mean at least one.

FIG. 1A depicts one embodiment of an atomic layer deposition processdescribed herein.

FIG. 1B depicts another embodiment of an atomic layer deposition processdescribed herein.

FIG. 1C depicts yet another embodiment of an atomic layer depositionprocess described herein.

FIG. 2 depicts a chemical vapor deposition technique that may be usedwhen depositing plasma resistant protective coating in accordance withembodiments.

FIG. 3 depicts different crystal phases of various rare-earth oxides atdifferent temperatures.

FIGS. 4A and 4B depict Transmission Electron Microscopy (TEM) image ofvarious scales (0.2 μm scale and 100 nm scale, respectively) of a 600 nmyttrium oxide coating without any interruption layers.

FIG. 4C depicts a TEM image at a 100 nm scale of a yttrium oxide coatingwith carbon-rich yttria interruption layers.

FIGS. 5A, 5B, and 5C depict exemplary plasma resistant protectivecoatings in accordance with examples 1, 2, and 3 respectively.

FIG. 6A depicts an X-Ray Diffraction (XRD) profile of a cubic yttriumoxide having a Powder Diffraction File (PDF) No. 04-005-4378.

FIG. 6B depicts an XRD profile of a multiphase mixture of a tetragonalzirconia and monoclinic zirconia as present in the interruption layersof example 1.

FIG. 6C depicts a transmission electron microscopy and energy dispersivespectroscopy (TEM/EDS) line scan of a multiphase mixture of a tetragonalzirconia and monoclinic zirconia as present in the interruption layersof example 1.

FIG. 6D depicts a high Angle Annular Dark Field (HAADF) ScanningTransmission Electron Microscopy (STEM) image of a multiphase mixture ofa tetragonal zirconia and monoclinic zirconia as present in theinterruption layers of example 1.

FIG. 7A depicts an XRD profile of a crystalline zirconium yttrium oxidehaving a chemical formula Zr_(0.86)Y_(0.14)O_(1.93) and a PDF No.01-082-1243 as present in the interruption layers of example 2.

FIG. 7B depicts a TEM/EDS line scan of a crystalline single phasezirconium yttrium oxide having a chemical formulaZr_(0.86)Y_(0.14)O_(1.93) as present in the interruption layers ofexample 2.

FIG. 7C depicts a HAADF STEM image of a crystalline single phasezirconium yttrium oxide having a chemical formulaZr_(0.86)Y_(0.14)O_(1.93) as present in the interruption layers ofexample 2.

FIGS. 7D and 7E depict a TEM image of various scales (10 nm scale and0.2 μm scale, respectively) of a crystalline zirconium yttrium oxidehaving a chemical formula Zr_(0.86)Y_(0.14)O_(1.93) as present in theinterruption layers of example 2.

FIG. 8A depicts an XRD profile of a multiphase mix of yttrium zirconiumoxide having a chemical formula Zr_(0.4)Y_(0.6)O_(1.7) and a PDF No.01-080-4014 and of yttrium oxide with a PDF No. 01-084-3893 as presentin the interruption layers of example 3.

FIG. 8B depicts a TEM/EDS line scan of a multiphase mix of yttriumzirconium oxide having a chemical formula Zr_(0.4)Y_(0.6)O_(1.7) and aPDF No. 01-080-4014 and of yttrium oxide with a PDF No. 01-084-3893 aspresent in the interruption layers of example 3.

FIG. 8C depicts a HAADF STEM image of a multiphase mix of yttriumzirconium oxide having a chemical formula Zr_(0.4)Y_(0.6)O_(1.7) and aPDF No. 01-080-4014 and of yttrium oxide with a PDF No. 01-084-3893 aspresent in the interruption layers of example 3.

FIG. 8D depicts a 0.2 μm scale TEM image of a multiphase mix of yttriumzirconium oxide having a chemical formula Zr_(0.4)Y_(0.6)O_(1.7) and aPDF No. 01-080-4014 and of yttrium oxide with a PDF No. 01-084-3893 aspresent in the interruption layers of example 3.

FIG. 9A depicts an exemplary plasma resistant protective coating inaccordance with example 4.

FIG. 9B depicts a TEM/EDS line scan of a multiphase mix of yttriumzirconium oxide having a chemical formula Zr_(0.4)Y_(0.6)O_(1.7) and aPDF No. 01-080-4014 and of yttrium oxide with a PDF No. 01-084-3893 aspresent in the interruption layers of example 4.

FIG. 9C depicts a HAADF STEM image of a multiphase mix of yttriumzirconium oxide having a chemical formula Zr_(0.4)Y_(0.6)O_(1.7) and aPDF No. 01-080-4014 and of yttrium oxide with a PDF No. 01-084-3893 aspresent in the interruption layers of example 4.

FIG. 9D depicts a 50 nm scale TEM image of a multiphase mix of yttriumzirconium oxide having a chemical formula Zr_(0.4)Y_(0.6)O_(1.7) and aPDF No. 01-080-4014 and of yttrium oxide with a PDF No. 01-084-3893 aspresent in the interruption layers of example 4.

FIG. 10 depicts an exemplary plasma resistant protective coating ofyttrium oxide and gadolinium oxide in accordance with example 5.

FIG. 11 illustrates a method for creating a plasma resistant protectivecoating using atomic layer deposition or chemical vapor deposition asdescribed herein.

FIG. 12 depicts an exemplary plasma resistant protective coating inaccordance with example 6.

FIG. 13A depicts a top down SEM image of a 1 μm yttria coating depositedby ALD without an interruption layer.

FIG. 13B depicts a top down SEM image of a 1 μm yttria coating withinterruption layers in accordance with example 6.

FIG. 14A depicts a cross sectional TEM image of a 1 μm yttria coatingdeposited by ALD without an interruption layer.

FIG. 14B depicts a cross sectional TEM image of a 1 μm yttria coatingwith interruption layers in accordance with example 6.

FIG. 15A depicts a TEM/EDS line scan of the plasma resistant protectivecoating of example 6.

FIG. 15B depicts a TEM image of the plasma resistant protective coatingof example 6.

DETAILED DESCRIPTION OF EMBODIMENTS

Embodiments described herein cover articles (e.g., coated chambercomponents) and methods where a plasma resistant protective coatinghaving one or more (poly)crystalline single phase or multiphaserare-earth oxide layers and one or more amorphous or (poly)crystallinesingle phase or multiphase interruption layers are deposited on asurface of an article. In an exemplary embodiment, the one or morecrystalline rare-earth oxide layers may comprise crystalline yttriumoxide in a cubic phase. Embodiments herein are described with acrystalline yttrium oxide layer in a cubic phase as an example. It willbe appreciated that the layer or layers between the interruption layersmay include any rare earth metal oxide or mixtures of rare earth metaloxides (i.e., with or without yttrium) that are in a (poly)crystallinesingle phase or multiphase. For instance, the rare earth metal oxidelayer(s) between the interruption layers may comprise yttrium oxideand/or yttrium zirconium oxide.

In an exemplary embodiment, the one or more amorphous or(poly)crystalline single phase or multiphase interruption layers maycomprise a crystalline or amorphous metal oxide layer selected from thegroup consisting of rare-earth metal-containing oxides, zirconium oxide,aluminum oxide and mixtures thereof. In embodiments where the one ormore interruption layers are (poly)crystalline single phase ormultiphase, the interruption layers may have an atomic crystalline phaseor a plurality of atomic crystalline phases that are different from thecubic phase of the crystalline yttrium oxide. For instance, a(poly)crystalline single phase or multiphase phase of the interruptionlayers may be selected from the group consisting of hexagonal phase,monoclinic phase, cubic phase (if the rare-earth oxide layer is yttriumoxide in the cubic phase, than the interruption layer may have a latticestructure that is different from the lattice structure of the cubicphase of the crystalline yttrium oxide), hexagonal phase, tetragonalphase, and combinations thereof.

As used herein, the term “plasma resistant” means resistant to one ormore types of plasma as well as resistant to chemistry and radicalsassociated with the one or more types of plasma.

As used herein, the term “polycrystalline” and “crystalline” are usedherein interchangeably and may mean a material that includes manycrystalline grains (also referred to as crystallites) that are randomlyoriented with respect to each other or have preferred orientation ortexture, and which may have varying sizes. The areas where crystallitesmeet are referred to as grain boundaries. A polycrystalline layer maycomprise a single crystal phase or a plurality of crystal phases (alsoreferred to herein by the term “multiphase”). As used herein, it isunderstood that reference to a multiphase layer refers to a crystallineor polycrystalline layer having multiple crystal phases.

The surface of the article may be a metal material (e.g., such as analuminum (e.g., Al 6061, Al 6063) and stainless steel) or a ceramicmaterial (e.g., such as alumina (Al₂O₃)).

The deposition process may be an atomic layer deposition (ALD) processor a chemical vapor deposition (CVD) process. The ALD and CVD processesmay be used for deposition of the one or more crystalline rare-earthoxide layers and of the one or more amorphous or crystalline metal oxideinterruption layers. Layers that comprise more than one metal may bedeposited through sequential deposition of precursors or throughco-deposition of precursors.

The plasma resistant protective coating may be comprised of a bi-layerstack or of a plurality of alternating layers stack. The bi-layer stackor plurality of alternating layers stack may include one or more layersof crystalline single phase yttrium oxide (Y₂O₃), e.g., in a cubicphase, and one or more layers of multiphase zirconium oxide layer, e.g.,in a tetragonal and monoclinic phase. The bi-layer stack or plurality ofalternating layers stack may include one or more layers of crystallinesingle phase yttrium oxide (Y₂O₃), e.g., in a cubic phase, and one ormore layers of crystalline single phase zirconium yttrium oxide layer,e.g., in a tetragonal phase. The bi-layer stack or plurality ofalternating layers stack may include one or more layers of crystallinesingle phase yttrium oxide (Y₂O₃), e.g., in a cubic phase in a firstlattice structure, and one or more layers of multiphase mixture ofzirconium yttrium oxide layer, e.g., in a cubic phase with a secondlattice structure, and yttrium oxide, e.g., in a cubic phase with athird lattice structure. The second and the third lattice structuresbeing different from the first lattice structure.

The thickness of each interruption layer in the multi-layer plasmaresistant protective coating may range from about 1 angstroms to about500 angstroms. The thickness of each rare-earth oxide layer in themulti-layer plasma resistant protective coating may range from about 500angstroms to about 10,000 angstroms. In some embodiments, the thicknessof each rare-earth oxide layer in the multi-layer plasma resistantprotective coating may range from about 500 angstroms to about 5000angstroms. In embodiments, multi-layer plasma resistant protectivecoating may have a thickness of about 1 μm to about 10 μm, or about 1 μmto about 5 μm. The plasma resistant protective coating may coat or coverthe surfaces of features in the article having high aspect ratios, e.g.,of about 10:1 to about 300:1. The plasma resistant protective coatingmay also conformally cover such features with a substantially uniformthickness. In one embodiment, the plasma resistant protective coatinghas a conformal coverage of the underlying surface that is coated(including coated surface features) with a uniform thickness having athickness variation from one part of the coating to another of less thanabout +/−20%, a thickness variation of +/−10%, a thickness variation of+/−5%, or a lower thickness variation. The plasma resistant protectivecoating is also very dense with a porosity of about 0% (e.g., the plasmaresistant protective coating may be porosity-free in embodiments).

ALD allows for a controlled self-limiting deposition of material throughchemical reactions with the surface of the article. Aside from being aconformal process, ALD is also a uniform process. All exposed sides ofthe article, including high aspect ratio features (e.g., about 10:1 toabout 300:1) will have the same or approximately the same amount ofmaterial deposited. A typical reaction cycle of an ALD process startswith a precursor (i.e., a single chemical A) flooded into an ALD chamberand adsorbed onto the surface of the article. The excess precursor isthen flushed out of the ALD chamber before a reactant (i.e., a singlechemical R) is introduced into the ALD chamber and subsequently flushedout. The metal oxide interruption layer may, however, be formed byco-deposition of materials. To achieve this, a mixture of twoprecursors, such as a first metal-containing oxide precursor (A) and asecond metal-containing oxide precursor (B), may be co-injected(A_(x)B_(y)) at any number of ratios, for example, A90+B10, A70+B30,A50+B50, A30+B70, A10+A90 and so on, into the chamber and adsorbed onthe surface of the article. In these examples, x and y are expressed inmolar ratios (mol %) for Ax+By. For example A90+B10 is 90 mol % of A and10 mol % of B. Alternatively, the two precursors may be injectedsequentially (without injecting a reactant in between). Excessprecursors are flushed out. A reactant is introduced into the ALDchamber and reacts with the adsorbed precursors to form a solid layerbefore the excess chemicals are flushed out. For ALD, the finalthickness of material is dependent on the number of reaction cycles thatare run, because each reaction cycle will grow a layer of a certainthickness that may be one atomic layer or a fraction of an atomic layer.

CVD allows for deposition of a highly dense, pure, and uniform coatingwith good reproducibility and adhesion at high deposition rates. Atypical reaction cycle of CVD may comprise: generating precursors from astarting material, transporting the precursors into a reaction chamber,absorbing the precursors onto a heated article, chemically reacting theprecursor with the surface of the article to be coated to form a depositand a gaseous by-product, and removing the gaseous by-product andunreacted gaseous precursors from the reaction chamber. The metal oxideinterruption layer may, however, be formed by co-deposition ofmaterials. To achieve this, a mixture of two precursors, such as a firstmetal-containing oxide precursor (A) and a second metal-containing oxideprecursor (B), may be co-injected (A_(x)B_(y)) at any number of ratios,similarly to the ALD technique, into the chamber and deposited on thesurface of the article.

Unlike other techniques typically used to deposit coatings on componentshaving high aspect ratio features, such as plasma spray coating and ionassisted deposition, the ALD and CVD techniques can deposit a layer ofmaterial within such features (i.e., on the surfaces of the features).Additionally, the ALD and CVD techniques produce relatively thin (e.g.,10 μm or less) coatings that are porosity-free (i.e., pin-hole free),which may eliminate crack formation during deposition. The term“porosity-free” as used herein means absence of any pores, pin-holes,voids, or cracks along the whole depth of the coating as measured bytransmission electron microscopy (TEM). The TEM may be performed using a100 nm thick TEM lamella prepared by focused ion beam milling, with theTEM operated at 200 kV in bright-field, dark-field, and high-resolutionmode. In contrast, with conventional e-beam IAD or plasma spraytechniques, cracks form upon deposition even at thicknesses of 5 or 10μm and the porosity may be 1-3% or even higher.

Plasma resistant protective coatings may be deposited on a variety ofarticles. In some embodiments, process chamber components, such as anelectrostatic chuck, a nozzle, a gas distribution plate, a showerhead,an electrostatic chuck component, a chamber wall, a liner, a liner kit,a gas line, a lid, a chamber lid, a nozzle, a single ring, a processingkit ring, a base, a shield, a plasma screen, a flow equalizer, a coolingbase, a chamber viewport, a bellow, a faceplate, selectivity modulatingdevice, plasma generation units (e.g., radiofrequency electrodes withhousings), and diffusers, would benefit from having these plasmaresistant protective coatings to protect the components in harshenvironments with corrosive plasmas. Many of these chamber componentshave high aspect ratios that range from about 10:1 to about 300:1 andother complex shapes which makes them difficult to coat well usingconventional deposition methods. Embodiments described herein enablehigh aspect ratio articles such as the aforementioned process chambercomponents to be coated with plasma resistant protective coatings thatprotect the articles.

Examples of processing gases that may be used to process substrates inthe processing chamber include halogen-containing gases, such as C₂F₆,SF₆, SiCl₄, HBr, NF₃, CF₄, CHF₃, CH₂F₃, F, NF₃, Cl₂, CCl₄, BCl₃ andSiF₄, among others, and other gases such as O₂, or N₂O. Examples ofcarrier gases include N₂, He, Ar, and other gases inert to process gases(e.g., non-reactive gases).

FIG. 1A depicts one embodiment of a deposition process 100 in accordancewith an ALD technique to grow or deposit a plasma resistant protectivecoating on an article. FIG. 1B depicts another embodiment of adeposition process 102 in accordance with an ALD technique as describedherein. FIG. 1C depicts yet another embodiment of a deposition process104 in accordance with an ALD deposition technique as described herein.Various types of ALD processes exist and the specific type may beselected based on several factors such as the surface to be coated, thecoating material, chemical interaction between the surface and thecoating material, etc. The general principle for the various ALDprocesses comprises growing a thin film layer by repeatedly exposing thesurface to be coated to pulses of gaseous chemical precursors thatchemically react with the surface one at a time in a self-limitingmanner.

FIGS. 1A-1C illustrate an article 110 having a surface. Article 110 mayrepresent various process chamber components (e.g., semiconductorprocess chamber components) including but not limited to anelectrostatic chuck, a nozzle, a gas distribution plate, a showerhead,an electrostatic chuck component, a chamber wall, a liner, a liner kit,a gas line, a lid, a chamber lid, a nozzle, a single ring, a processingkit ring, a base, a shield, a plasma screen, a flow equalizer, a coolingbase, a chamber viewport, a bellow, a faceplate, selectivity modulatingdevice, and so on. The article 110 (and article 230 in FIG. 2) may bemade from a metal (such as aluminum, stainless steel), a ceramic (suchas Y₂O₃, Al₂O₃, Y₃Al₅O₁₂ (YAG), and so forth), a metal-ceramiccomposite, a polymer, a polymer ceramic composite, mylar, polyester, orother suitable materials, and may further comprise materials such as AN,Si, SiC, Al₂O₃, SiO₂, and so on.

For ALD, either adsorption of a precursor onto a surface or a reactionof a reactant with the adsorbed precursor may be referred to as a“half-reaction.” During a first half reaction, a precursor is pulsedonto the surface of the article 110 (or onto a layer formed on thearticle 110) for a period of time sufficient to allow the precursor tofully adsorb onto the surface. The adsorption is self-limiting as theprecursor will adsorb onto a finite number of available sites on thesurface, forming a uniform continuous adsorption layer on the surface.Any sites that have already adsorbed a precursor will become unavailablefor further adsorption with the same precursor unless and/or until theadsorbed sites are subjected to a treatment that will form new availablesites on the uniform continuous coating. Exemplary treatments may beplasma treatment, treatment by exposing the uniform continuousadsorption layer to radicals, or introduction of a different precursorable to react with the most recent uniform continuous layer adsorbed tothe surface.

In some embodiments, two or more precursors are injected together andadsorbed onto the surface of an article. The excess precursors arepumped out until an oxygen-containing reactant is injected to react withthe adsorbents to form a single metal oxide layer or a multi-metal oxidelayer (e.g., of YAG, a phase of Y₂O₃—ZrO₂, and so on). This fresh layeris ready to adsorb the precursors in the next cycle.

In FIG. 1A, article 110 may be introduced to a first precursor 160 for afirst duration until a surface of article 110 is fully adsorbed with thefirst precursor 160 to form an adsorption layer 114. Subsequently,article 110 may be introduced to a first reactant 165 to react with theadsorption layer 114 to grow a rare-earth oxide layer 116 (e.g., so thatthe rare-earth oxide layer 116 is fully grown or deposited, where theterms grown and deposited may be used interchangeably herein). The firstprecursor 160 may be a precursor for yttrium or another metal, forexample. The first reactant 165 may be oxygen, water vapor, ozone, pureoxygen, oxygen radicals, or another oxygen source if the rare-earthlayer 116 is an oxide. Accordingly, ALD may be used to form therare-earth oxide layer 116.

In an example where the rare-earth oxide layer 116 is a yttria (Y₂O₃)rare-earth oxide layer, article 110 (e.g., an Al6061 substrate with orwithout an Alumina buffer layer) may be introduced to a first precursor160 (e.g., tris(methylcyclopentadienyl) yttrium) for a first durationuntil all the reactive sites on the surface are consumed. The remainingfirst precursor 160 is flushed away and then a first reactant 165 of H₂Ois injected into the reactor to start the second half cycle. Arare-earth oxide layer 116 of Y₂O₃ is formed after H₂O molecules reactwith the Y containing adsorption layer created by the first halfreaction.

Rare-earth oxide layer 116 may be uniform, continuous and conformal. Therare-earth oxide layer 116 may be porosity free (e.g., have a porosityof 0) or have an approximately 0 porosity in embodiments (e.g., aporosity of 0% to 0.01%). Layer 116 may have a thickness of less thanone atomic layer to a few atoms in some embodiments after a single ALDdeposition cycle. Some metalorganic precursor molecules are large.

Multiple full ALD deposition cycles may be implemented to deposit athicker rare-earth oxide layer 116, with each full cycle (e.g.,including introducing precursor 160, flushing, introducing reactant 165,and again flushing) adding to the thickness by an additional fraction ofan atom to a few atoms. As shown, up to n full cycles may be performedto grow the rare-earth oxide layer 116, where n is an integer valuegreater than 1. In embodiments, rare-earth oxide layer 116 may have athickness of about 500 angstroms to about 10000 angstroms, about 500angstroms to about 5000 angstroms, about 1000 angstroms to about 5000angstroms, or about 1500 angstroms to about 2500 angstroms.

Since ALD is used for the deposition, the internal surfaces of highaspect ratio features such as gas delivery holes in a showerhead or agas delivery line may be coated, and thus an entirety of a component maybe protected from exposure to a corrosive environment.

Layer 116 may be Y₂O₃, such as crystalline Y₂O₃ having a single cubicphase, in embodiments. In one embodiment, the yttrium oxide cubic phasemay display an X-Ray Diffraction profile that corresponds to a PowderDispersion File No. 04-005-4378.

It should be understood that in some embodiments, layer 116 may comprisemore than one rare-earth metal. Depositing a multi-elemental rare earthoxide layer via ALD may occur through sequential deposition as describedregarding the metal oxide layer in FIG. 1B or co-deposition as describedin more detail in FIG. 1C.

Subsequently, article 110 having layer 116 may be introduced to anadditional precursor(s) 170 for a second duration until a surface ofrare-earth oxide layer 118 is fully adsorbed with the additionalprecursor(s) 170 to form an adsorption layer 118. Subsequently, article110 may be introduced to a reactant 175 to react with adsorption layer118 to grow an amorphous or a crystalline single phase or multiphasemetal oxide layer 120, also referred to as the interruption layer 120for simplicity (e.g., so that the interruption layer 120 is fully grownor deposited). Accordingly, the interruption layer 120 is fully grown ordeposited over rare-earth oxide layer 116 using ALD. In an example,precursor 170 may be a zirconium containing precursor (e.g.,tris(dimethylamino)cyclopentadienyl zirconium) used in the first halfcycle, and reactant 175 may be ozone used in the second half cycle.

The interruption layer 120 forms the amorphous or crystalline singlephase or multiphase metal oxide layer, which may be uniform, continuousand conformal. The second layer 120 may have a very low porosity of lessthan 1% in embodiments, and less than 0.1% in further embodiments, andabout 0% in embodiments or porosity-free in still further embodiments.Second layer 120 may have a thickness of less than an atom to a fewatoms (e.g., 2-3 atoms) after a single full ALD deposition cycle.Multiple ALD deposition stages may be implemented to deposit a thickerinterruption layer 120, with each stage adding to the thickness by anadditional fraction of an atom to a few atoms. As shown, the fulldeposition cycle may be repeated m times to cause the interruption layer120 to have a target thickness, where m is an integer value greaterthan 1. In embodiments, interruption layer 120 may have a thickness ofabout 1 angstroms to about 500 angstroms, about 2 angstroms to about 200angstroms, or about 3 angstroms to about 50 angstroms.

A ratio of the rare-earth oxide layer thickness to the interruptionlayer thickness may be about 5000:1 to about 1:1 or about 2500:1. Insome embodiments, the ratio of rare-earth oxide thickness to theinterruption layer thickness may be about 500:1 to about 1:1. In yetother embodiments, the ratio of rare-earth oxide thickness to theinterruption layer thickness may be about 2500:8, about 2500:12, orabout 2500:16. The ratio of rare-earth oxide layer to the interruptionlayer may be such that the protective coating provides improvedcorrosion and erosion resistance as well as improved resistance tocracking and/or delamination caused by chamber processing. The thicknessratio may be selected in accordance with specific chamber applications.

As shown in FIGS. 4A and 4B, yttrium oxide layer deposited without aninterruption layer result in uncontrollable and abnormally large graingrowth. For instance, abnormally large yttrium oxide grains shown inFIGS. 4A and 4B may have a height of about 100 nm and a width of about200 nm. These abnormally large grains lead to higher surface roughnessand make the coating more prone to defect. This phenomenon is apparentwith a yttrium oxide coating of 600 nm thickness and will become evenmore pronounced with a yttrium oxide coating of greater thickness (seefor examples FIG. 14A for grains in a 1 μm thick yttria coating withoutinterruption layers). Furthermore, the lack of interruption layersprovides chemicals a direct pathway to diffuse through cracks and spacesbetween large grains and reach the interface between the coating and thearticle, potentially harming the coated article.

FIG. 4C illustrates interruption layers between layers of yttrium oxide(i.e., after every layer of yttrium oxide with a thickness of 250 nm acarbon-rich yttrium oxide interruption layer was deposited). Indeed, theyttrium oxide grain growth is more controlled and so are the surfaceboundaries and surface roughness. None of the grains in FIG. 4C exceed100 nm in length of 200 nm in width. Furthermore, there is no directpathway from the corrosive chamber environment all the way through thecoating to the interface between the coating and the article. However,the high carbon content in the interruption layer, makes the layerrelatively weak. As a result, during processing, upon the exertion ofthe compressive stress on the protective coating, the top yttrium oxidelayer buckles up and begins to laminate, as depicted in FIG. 4C. Suchdelamination generates particles and affects the lifetime of the coatedarticle, the lifetime of the coating, and wafer processing. Compressivestress is exerted after fluorination, when the crystalline lattice ofthe protective coating begins to expand.

If the interruption layer was stronger than the carbon interruptionlayers, the yttrium oxide layers and interruption layers would remainconnected and would not buckle up. A stronger interruption layer isbelieved to be one that has a similar composition to the yttrium oxidelayer but a dissimilar atomic crystalline phase that would inhibituncontrollable grain growth. Thus, the decision as to the type of metaloxide layer selected for the interruption layer, the type of rare-earthoxide layer selected, and their corresponding thicknesses, shouldaccount for the need to control grain growth of the rare earth oxide,while also ensuring a sufficiently strong bond between the rare earthoxide layer and the interruption layer so as to prevent delamination andparticle generation.

Interruption layer 120 may be any of the aforementioned rare-earthmetal-containing oxide layers as well as zirconium oxide, aluminum oxideand mixtures thereof. For example, the interruption layer 120 may beZrO₂, alone or in combination with one or more other rare earth metaloxides. In some embodiments, interruption layer 120 is a crystallinesingle phase or multiphase material having one or more atomiccrystalline phases formed from a single metal oxide or a mixture of atleast two metal oxide precursors that have been sequentially depositedor co-deposited by ALD. For example, interruption layer 120 may be oneof La₂O₃, Pr₂O₃, Nd₂O₃, Sm₂O₃, Eu₂O₃, Gd₂O₃, Tb₂O₃, Dy₂O₃, Ho₂O₃, Er₂O₃,Tm₂O₃, Yb₂O₃, ZrO₂, and combinations thereof (as depicted in FIG. 3). Incertain embodiments, the interruption layer may be amorphous. Inembodiments when the interruption layer is crystalline, the one or morecrystalline atomic phases of the interruption layer may be differentfrom the one or more crystalline atomic phase of the rare-earth oxidelayer. In embodiments when at least one of the crystalline atomic phasesof the interruption layer is the same as the at least one crystallineatomic phase of the rare-earth oxide layer, the lattice structure of thesimilar crystalline atomic phases may differ. For instance, the atomiccrystalline phase(s) may be selected from the group consisting ofhexagonal, tetragonal, cubic, monoclinic, and combinations thereof.

In some embodiments, first layer 116 and second layer 120 may,independently, include a material such as Y₂O₃ and Y₂O₃ based ceramics,Y₃Al₅O₁₂ (YAG), Al₂O₃ (alumina), Y₄Al₂O₉ (YAM), ErAlO₃, GdAlO₃, NdAlO₃,YAlO₃, TiO₂ (titania), ZrO₂ (zirconia), Y₂O₃ stabilized ZrO₂ (YSZ),Er₂O₂ and Er₂O₂ based ceramics, Gd₂O₃ and Gd₂O₃ based ceramics,Er₃Al₅O₁₂ (EAG), Gd₃Al₅O₁₂ (GAG), Nd₂O₃ and Nd₂O₃ based ceramics, aceramic compound comprising Y₂O₃ and YF₃ (e.g., Y-O-F), a ceramiccompound comprising Y₄Al₂O₉ and a solid-solution of Y₂O₃—ZrO₂, a ceramiccompound comprising Y₂O₃, Er₂O₂, ZrO₂, Gd₂O₃ and SiO₂, or a combinationof any of the above.

The material of first layer 116 and second layer 120 may also be basedon a solid solution formed by any of the aforementioned ceramics. Thematerial may also be a multiphase material that includes a solidsolution of one or more of the aforementioned materials and one or moreadditional phase.

With reference to the solid-solution of Y₂O₃—ZrO₂, the material mayinclude Y₂O₃ at a concentration of 10-90 molar ratio (mol %) and ZrO₂ ata concentration of 10-90 mol %. In some examples, the solid-solution ofY₂O₃—ZrO₂ may include 10-20 mol % Y₂O₃ and 80-90 mol % ZrO₂, may include20-30 mol % Y₂O₃ and 70-80 mol % ZrO₂, may include 30-40 mol % Y₂O₃ and60-70 mol % ZrO₂, may include 40-50 mol % Y₂O₃ and 50-60 mol % ZrO₂, mayinclude 60-70 mol % Y₂O₃ and 30-40 mol % ZrO₂, may include 70-80 mol %Y₂O₃ and 20-30 mol % ZrO₂, may include 80-90 mol % Y₂O₃ and 10-20 mol %ZrO₂, and so on.

With reference to the ceramic compound comprising Y₄Al₂O₉ and asolid-solution of Y₂O₃—ZrO₂, in one embodiment the ceramic compoundincludes 62.93 molar ratio (mol %) Y₂O₃, 23.23 mol % ZrO₂ and 13.94 mol% Al₂O₃. In another embodiment, the ceramic compound can include Y₂O₃ ina range of 50-75 mol %, ZrO₂ in a range of 10-30 mol % and Al₂O₃ in arange of 10-30 mol %. In another embodiment, the ceramic compound caninclude Y₂O₃ in a range of 40-100 mol %, ZrO₂ in a range of 0.1-60 mol %and Al₂O₃ in a range of 0.1-10 mol %. In another embodiment, the ceramiccompound can include Y₂O₃ in a range of 40-60 mol %, ZrO₂ in a range of35-50 mol % and Al₂O₃ in a range of 10-20 mol %. In another embodiment,the ceramic compound can include Y₂O₃ in a range of 40-50 mol %, ZrO₂ ina range of 20-40 mol % and Al₂O₃ in a range of 20-40 mol %. In anotherembodiment, the ceramic compound can include Y₂O₃ in a range of 80-90mol %, ZrO₂ in a range of 0.1-20 mol % and Al₂O₃ in a range of 10-20 mol%. In another embodiment, the ceramic compound can include Y₂O₃ in arange of 60-80 mol %, ZrO₂ in a range of 0.1-10 mol % and Al₂O₃ in arange of 20-40 mol %. In another embodiment, the ceramic compound caninclude Y₂O₃ in a range of 40-60 mol %, ZrO₂ in a range of 0.1-20 mol %and Al₂O₃ in a range of 30-40 mol %. In other embodiments, otherdistributions may also be used for the ceramic compound.

In one embodiment, the material includes or consists of a ceramiccompound that includes a combination of Y₂O₃, ZrO₂, Er₂O₂, Gd₂O₃ andSiO₂. In one embodiment, the ceramic compound can include Y₂O₃ in arange of 40-45 mol %, ZrO₂ in a range of 0-10 mol %, Er₂O₂ in a range of35-40 mol %, Gd₂O₃ in a range of 5-10 mol % and SiO2 in a range of 5-15mol %. In a first example, the alternative ceramic compound includes 40mol % Y₂O₃, 5 mol % ZrO₂, 35 mol % Er₂O₂, 5 mol % Gd₂O₃ and 15 mol %SiO₂. In a second example, the alternative ceramic compound includes 45mol % Y₂O₃, 5 mol % ZrO₂, 35 mol % Er₂O₂, 10 mol % Gd₂O₃ and 5 mol %SiO₂. In a third example, the alternative ceramic compound includes 40mol % Y₂O₃, 5 mol % ZrO₂, 40 mol % Er₂O₂, 7 mol % Gd₂O₃ and 8 mol %SiO₂.

Any of the aforementioned materials may include trace amounts of othermaterials such as ZrO₂, Al₂O₃, SiO₂, B₂O₃, Er₂O₂, Nd₂O₃, Nb₂O₅, CeO₂,Sm₂O₃, Yb₂O₃, or other oxides. The materials allow for longer workinglifetimes due to the plasma resistance of the ceramic materials anddecreased on-wafer or substrate contamination.

With reference to FIG. 1B, in some embodiments, the plasma resistantprotective coating contains more than two layers. Specifically, theplasma resistant protective coating may include a stack of alternatinglayers of the rare-earth oxide layer and interruption layer.

Referring to FIG. 1B, an article 110 having a rare-earth oxide layer 116may be inserted into a deposition chamber. The rare-earth oxide layer116 may have been formed as set forth with reference to FIG. 1A. FIG. 1Billustrate an ALD process with sequential deposition to form amulti-elemental interruption layer. Article 110 having rare-earth oxidelayer 116 may be introduced to one or more precursors 180 for a durationuntil a surface of rare-earth oxide layer 116 is fully adsorbed with theone or more additional precursors 180 to form an adsorption layer 122.Subsequently, article 110 may be introduced to a reactant 182 to reactwith adsorption layer 122 to grow a solid metal oxide layer 124.Accordingly, the metal oxide layer 124 is fully grown or deposited overrare-earth oxide layer 116 using ALD. In an example, precursor 180 maybe a zirconium containing precursor used in the first half cycle, andreactant 182 may be H₂O used in the second half cycle. The metal oxidelayer one of La₂O₃, Pr₂O₃, Nd₂O₃, Sm₂O₃, Eu₂O₃, Gd₂O₃, Tb₂O₃, Dy₂O₃,Ho₂O₃, Er₂O₃, Tm₂O₃, Yb₂O₃, ZrO₂, Al₂O₃ or another oxide andcombinations thereof.

Article 110 having rare-earth oxide layer 116 and metal oxide layer 124may be introduced to one or more precursors 184 for a duration until asurface of metal oxide layer 124 is fully adsorbed with the one or moreprecursors 184 to form an adsorption layer 126. Precursor 184 may bedifferent from precursor 180. Subsequently, article 110 may beintroduced to a reactant 186 to react with adsorption layer 126 to growan additional solid metal oxide layer 128. Accordingly, the additionalmetal oxide layer 128 is fully grown or deposited over the metal oxidelayer 124 using ALD. In an example, precursor 184 may be a yttriumcontaining precursor used in the first half cycle, and reactant 186 maybe H₂O used in the second half cycle. The metal oxide layer 124 may beone of La₂O₃, Pr₂O₃, Nd₂O₃, Sm₂O₃, Eu₂O₃, Gd₂O₃, Tb₂O₃, Dy₂O₃, Ho₂O₃,Er₂O₃, Tm₂O₃, Yb₂O₃, ZrO₂, or another oxide and combinations thereof.

In some embodiments, the metal oxide layer may be crystalline and may beselected from the group consisting of: a composition ranging from a purecrystalline single phase zirconia in at least one of a tetragonal phaseor a monoclinic phase to a crystalline multiphase or a crystallinesingle phase yttrium zirconium oxide with an atomic percentage ofzirconium of about 5%, based on the total atoms in the composition; amixture of about 65 wt % of zirconium oxide in a tetragonal phase andabout 35 wt % of zirconium oxide in a monoclinic phase; about 100 wt %multi-elemental oxide of zirconium yttrium oxide in a tetragonal phase;a mixture of about 70 wt % of a multi-elemental oxide of zirconiumyttrium oxide in a first cubic phase and about 30 wt % of yttrium oxidein a second cubic phase, wherein the first cubic phase and the secondcubic phase have a lattice structure that is different from the latticestructure of the crystalline yttrium oxide layer; and a mixture of about30 wt % of a multi-elemental oxide of zirconium yttrium oxide in thefirst cubic phase and about 70 wt % of yttrium oxide in the second cubicphase.

As shown, the deposition of the metal oxide 124 and the second metaloxide 128 may be repeated x times to form a stack 137 of alternatinglayers, where x is an integer value greater than 1. x may represent afinite number of layers selected based on the targeted thickness andproperties. The stack 137 of alternating layers may be considered as aninterruption layer containing multiple alternating sub-layers.Accordingly, precursor 180, reactant 182, precursor 184 and reactant 186may be repeatedly introduced sequentially to grow or deposit additionalalternating layers 130, 132, 134, 136, and so on. Each of the layers124, 128, 130, 132, 134, 136, and so on may be very thin layers having athickness of less than a single atomic layer to a few atomic layers.

The alternating layers 124-136 described above have a 1:1 ratio, wherethere is a single layer of a first metal oxide for each single layer ofa second metal oxide. However, in other embodiments there may be otherratios such as 2:1, 3:1, 4:1, and so on between the different types ofmetal oxide layers. For example, three ZrO₂ layers may be deposited forevery Y₂O₃ layer in an embodiment. Additionally, the stack 137 ofalternating layers 124-136 have been described as an alternating seriesof two types of metal oxide layers. However, in other embodiments morethan two types of metal oxide layers may be deposited in an alternatingstack 137. For example, the stack 137 may include three differentalternating layers (e.g., a first layer of Y₂O₃, a first layer of Al₂O₃,a first layer of ZrO₂, a second layer of Y₂O₃, a second layer of Al₂O₃,a second layer of ZrO₂, and so on).

The process of forming multi-layer stack 137 of metal oxide interruptionlayer is also referred to herein as sequential deposition. Suchsequential deposition may also be used for the rare-earth oxide layerwhen the rare-earth oxide layer contains more than one rare-earth.

After the stack 137 of alternating layers has been formed, an annealprocess may be performed to cause the alternating layers of differentmaterials to diffuse into one another and form a complex oxide having asingle crystalline phase or multiple crystalline phases. After theannealing process, the stack of alternating layers 137 may thereforebecome a single interruption layer 138. For example, if the layers inthe stack are Y₂O₃, Al₂O₃, and ZrO₂, then the resulting rare-earthmetal-containing oxide layer 138 may a ceramic compound comprisingY₄Al₂O₉ and a solid-solution of Y₂O₃—ZrO₂.

In some embodiments, the deposition of rare-earth oxide layer 116 andinterruption layer stack 137 (or 138 if annealed) may be repeated znumber of times to form a final plasma resistant protective coating. Thefinal plasma resistant protective coating may comprise alternatinglayers of rare-earth oxide layers and intermittent metal oxideinterruption layers.

Referring to FIG. 1C, an article 110 having a rare-earth oxide layer 116may be inserted into a deposition chamber. The rare-earth oxide layer116 may have been formed as set forth with reference to FIG. 1A. Article110 having rare-earth oxide layer 116 may be introduced, in someembodiments, to a plurality of precursors 190A, 190B that may beco-injected or sequentially injected for a duration until a surface ofrare-earth oxide layer 116 is fully adsorbed with the plurality ofprecursors 190A, 190B to form a multi-elemental adsorption layer 140.Subsequently, article 110 may be introduced to a reactant 192 to reactwith adsorption layer 140 to grow a solid multi-elemental metal oxidelayer 142. Accordingly, the multi-elemental metal oxide layer 142 isfully grown or deposited over rare-earth oxide layer 116 using ALD. Theprocess of introducing the precursors 190A, 190B and then the reactant192 may be repeated y times to cause the multi-elemental metal oxideinterruption layer 142 to have a target thickness and ultimately form anamorphous or a crystalline single phase or multiphase interruptionlayer. In FIG. 1C, y is an integer greater than 1.

The process of forming interruption layer 142 in FIG. 1C is alsoreferred to herein as co-deposition deposition. Such co-deposition mayalso be used for the rare-earth oxide layer when the rare-earth oxidelayer contains more than one rare-earth.

The deposition of the rare-earth oxide layer 116 and interruption layer142 may be repeated z times to form a stack of alternating layers whichform the final plasma resistant protective coating. z may be an integervalue greater than 1. z may represent a finite number of layers selectedbased on the targeted thickness and properties of the final plasmaresistant protective coating.

The final structure shown in FIGS. 1A-1B are a cross sectional side viewof an article 110 coated with a bilayer plasma resistant protectivecoating that comprises a crystalline rare-earth oxide layer 116 and anamorphous or a crystalline interruption layer 120 (per FIG. 1A), 137 or138 (per FIG. 1B). The final structure shown in FIG. 1C is a crosssectional side view of an article 110 coated with a multilayer plasmaresistant protective coating that comprises a rare-earth oxide layer 116and amorphous or crystalline interruption layers 142. The crystallinerare-earth oxide layer 116 may be yttrium oxide in a cubic phase with afirst lattice structure in some embodiments. The crystalline oramorphous interruption layer 120, 137/138, or 142 may comprise arare-earth metal oxide, zirconium oxide, aluminum oxide or a mixturethereof. In embodiments where the interruption layer is crystalline, theinterruption may have one or more crystalline phases that are differentfrom the crystalline phase of the rare-earth oxide layer 116.

Interruption layers 120, 137/138, or 142 may be, independently, selectedfrom the list of materials enumerated above.

The crystalline rare-earth oxide layer 116 may have a thickness of about500 angstroms to about 5000 angstroms. In embodiments, the rare-earthoxide layer may have a thickness of about 1000-5000 angstroms. Infurther embodiments, the rare-earth oxide layer 116 may have a thicknessof about 1500-2500 angstroms.

The interruption layers 120, 137/138, or 142 may have a thickness ofabout 1 angstrom to about 500 angstroms and may be formed by performingabout 1-500 cycles of an ALD process, where each cycle forms a nanolayer(or slightly less or more than a nanolayer) of the interruption layer.In embodiments, the interruption layer 120, 137/138, or 142 may have athickness of about 2 angstroms to about 200 angstroms. In furtherembodiments, the interruption layer 120, 137/138, or 142 may have athickness of about 3 angstroms to about 50 angstroms. In one embodiment,each layer of the interruption layer is formed using about 1-10 ALDcycles.

In further embodiments, the plasma resistant protective coating may havea thickness of about 500 nm to about 5 μm. In further embodiments, theplasma resistant protective coating may have a thickness of about 1 μmto about 5 μm, or about 1 μm to about 2 μm. The interruption layers 120,137, 138, or 142 between the rare-earth metal oxide layers 116 mayinhibit uncontrollable and abnormally large crystal growth in therare-earth oxide layers.

In the embodiments described with reference to FIGS. 1A-1C, the surfacereactions (e.g., half-reactions) may be done sequentially, i.e. wherethe various precursors and reactants are not in contact. Prior tointroduction of a new precursor or reactant, the chamber in which theALD process takes place may be purged with an inert carrier gas (such asnitrogen or air) to remove any unreacted precursor and/orsurface-precursor reaction byproducts. The precursors may be differentfor each layer. In some embodiments, the surface reactions may be donethrough co-deposition, i.e., where at least two precursors are used, insome embodiments at least three precursors are used and in yet furtherembodiments at least four precursors are used. Prior to the introductionof one or more reactants, the plurality of precursors may be co-injectedinto the ALD chamber. The ALD chamber may be purged with an inertcarrier gas (such as nitrogen or air) to remove any unreacted precursorsand/or surface-precursor reaction byproducts.

ALD processes may be conducted at various temperatures depending on thetype of process. The optimal temperature range for a particular ALDprocess is referred to as the “ALD temperature window.” Temperaturesbelow the ALD temperature window may result in poor growth rates andnon-ALD type deposition. Temperatures above the ALD temperature windowmay result in reactions taken place via a chemical vapor deposition(CVD) mechanism. The ALD temperature window may range from about 100° C.to about 400° C. In some embodiments, the ALD temperature window isbetween about 120-300° C.

The ALD process allows for a conformal plasma resistant protectivecoating having uniform thickness on articles and surfaces having complexgeometric shapes, holes with high aspect ratios, and three-dimensionalstructures. Sufficient exposure time of each precursor to the surfaceenables the precursor to disperse and fully react with the surface inits entirety, including all of its three-dimensional complex features.The exposure time utilized to obtain conformal ALD in high aspect ratiostructures is proportionate to the square of the aspect ratio and can bepredicted using modeling techniques. Additionally, the ALD technique isadvantageous over other commonly used coating techniques because itallows in-situ on demand material synthesis of a particular compositionor formulation without the need for a lengthy and difficult fabricationof source materials (such as powder feedstock and sintered targets). Insome embodiments ALD is used to coat articles aspect ratios of about10:1 to about 300:1.

With the ALD techniques described herein, multi-component films can begrown, deposited or co-deposited, for example, by proper mixtures of theprecursors used to grow the interruption layer as described above and inmore detail in the examples below.

In some embodiments, the plasma resistant protective coating may bedeposited on a surface of an article via CVD. An exemplary CVD system isillustrated in FIG. 2. The system comprises a chemical vapor precursorsupply system 205 and a CVD reactor 210. The role of the vapor precursorsupply system 205 is to generate vapor precursors 220 from a startingmaterial 215, which could be in a solid, liquid, or gas form. The vaporsmay subsequently be transported into CVD reactor 210 and get depositedas a plasma resistant protective coat 225 and/or 245 on the surface ofarticle 230, in accordance with an embodiment, which may be positionedon article holder 235.

The plasma resistant protective coating depicted in FIG. 2 comprises abilayer of a crystalline single phase or multiphase rare-earth oxidelayer 225 and an amorphous or a crystalline single phase or multiphasemetal oxide interruption layer 245. It is understood by one of ordinaryskill in the art that although only a bilayer is exemplified withrespect to the CVD process, a multilayer plasma resistant protectivecoating is also contemplated herein with respect to a CVD process. Amultilayer plasma resistant protective coating comprising a stack ofalternating layers of a (poly)crystalline single phase or multiphaserare-earth oxide and an amorphous or (poly)crystalline single phase ormultiphase metal oxide interruption layers deposited by CVD arecontemplated in certain embodiments herein.

CVD reactor 210 heats article 230 to a deposition temperature usingheater 240. In some embodiments, the heater may heat the CVD reactor'swall (also known as “hot-wall reactor”) and the reactor's wall maytransfer heat to the article. In other embodiments, the article alonemay be heated while maintaining the CVD reactor's wall cold (also knownas “cold-wall reactor”). It is to be understood that the CVD systemconfiguration should not be construed as limiting. A variety ofequipment could be utilized for a CVD system and the equipment is chosento obtain optimum processing conditions that may give a coating withuniform thickness, surface morphology, structure, and composition.

The various CVD techniques include the following phases: (1) generateactive gaseous reactant species (also known as “precursors”) from thestarting material; (2) transport the precursors into the reactionchamber (also referred to as “reactor”); (3) absorb the precursors ontothe heated article; (4) participate in a chemical reaction between theprecursor and the article at the gas-solid interface to form a depositand a gaseous by-product; and (5) remove the gaseous by-product andunreacted gaseous precursors from the reaction chamber.

Suitable CVD precursors may be stable at room temperature, may have lowvaporization temperature, can generate vapor that is stable at lowtemperature, have suitable deposition rate (low deposition rate for thinfilm coatings and high deposition rate for thick film coatings),relatively low toxicity, be cost effective, and relatively pure. Forsome CVD reactions, such as thermal decomposition reaction (also knownas “pyrolysis”) or a disproportionation reaction, a chemical precursoralone may suffice to complete the deposition.

CVD has many advantages including its capability to deposit highly denseand pure coatings and its ability to produce uniform films with goodreproducibility and adhesion at reasonably high deposition rates. Layersdeposited using CVD in embodiments may have a porosity of below 1%, anda porosity of below 0.1% (e.g., around 0%). Therefore, it can be used touniformly coat complex shaped components and deposit conformal filmswith good conformal coverage (e.g., with substantially uniformthickness). CVD may also be utilized to deposit a film made of aplurality of components, for example, by feeding a plurality of chemicalprecursors at a predetermined ratio into a mixing chamber and thensupplying the mixture to the CVD reactor system.

The CVD and ALD processes described herein may be used to form a plasmaresistant protective coat that is resistant to erosion and/or corrosionin embodiments. Plasma resistant protective coat deposited by ALD or CVDmay comprise a stack of alternating layers of crystalline rare-earthoxide layers and amorphous or crystalline interruption layers. In oneembodiment, the plasma resistant protective coating may be a bilayer ofa crystalline rare-earth oxide layer and an amorphous or crystallineinterruption layer. When the plasma resistant protective coatingcomprises a stack of alternating layers, the first layer may be arare-earth oxide layer. The amorphous or crystalline interruption layersmay inhibit crystal/grain growth in the crystalline rare-earth oxidelayers such that the grain size in the rare-earth oxide layer does notexceed the thickness of the rare-earth oxide layer and in someembodiments, so that the grain size does not exceed 100 nm or 200 nm.

The rare-earth oxide layers may have one or more atomic crystallinephases. The interruption layers may have one or more atomic crystallinephases that is/are different from the atomic crystalline phase(s) of therare-earth oxide layer so as to inhibit crystal growth of the rare-earthoxide crystals. For instance, in one embodiment, the rare-earth oxidelayers may be yttrium oxide layers in the cubic phase. In oneembodiment, the interruption layers may be zirconium oxide layers in thetetragonal and monoclinic phases.

When the rare-earth oxide layer or the interruption layer contains morethan one metal oxide, the materials forming each layer may be depositedsequentially or co-deposited (as described in detail for the ALD processthrough FIGS. 1A-1C). In some embodiments, layers containing more thanone metal oxide may be subject to post coating heat treatment. In someembodiments, each layer in the plasma resistant protective coating orthe final plasma resistant protective coat may be subject to postcoating processing to form one or more features therein.

Exemplary yttrium-containing precursors that may be utilized with theCVD and ALD coating deposition techniques include, but are not limitedto, tris(N,N-bis(trimethylsilyl)amide)yttrium (III), yttrium(III)butoxide, tris(cyclopentadienyl)yttrium(III), and Y(thd)3(thd=2,2,6,6-tetramethyl-3,5-heptanedionato).

Exemplary erbium-containing precursors that may be utilized with the ALDand CVD coating deposition techniques include, but are not limited to,tris-methylcyclopentadienyl erbium (III) (Er(MeCp)₃), erbium boranamide(Er(BA)₃), Er(TMHD)₃, erbium(III)tris(2,2,6,6-tetramethyl-3,5-heptanedionate), andtris(butylcyclopentadienyl)erbium(III).

Exemplary aluminum-containing precursors that may be utilized with theALD and CVD coating deposition techniques include, but are not limitedto, diethylaluminum ethoxide, tris(ethylmethylamido)aluminum, aluminumsec-butoxide, aluminum tribromide, aluminum trichloride,triethylaluminum, triisobutylaluminum, trimethylaluminum, andtris(diethylamido)aluminum.

Exemplary zirconium-containing precursors that may be utilized with theALD and CVD coating deposition techniques include, but are not limitedto, zirconium (IV) bromide, zirconium (IV) chloride, zirconium (IV)tert-butoxide, tetrakis(diethylamido)zirconium (IV),tetrakis(dimethylamido)zirconium (IV), andtetrakis(ethylmethylamido)zirconium (IV).

Exemplary oxygen-containing reactants that may be utilized with thevarious coating deposition techniques identified herein and theirequivalent include, but are not limited to, ozone, water vapor, oxygen,and oxygen radicals.

FIG. 11 illustrates a method 300 for forming a plasma resistantprotective coating comprising a rare-earth oxide layer and a metal oxideinterruption layer on an article such as a process chamber componentaccording to embodiments. Method 300 may be used to coat any articlesincluding articles having aspect ratios of about 3:1 to about 300:1(e.g., aspect ratios of 20:1, 50:1, 100:1, 150:1, and so on). The methodmay optionally begin by selecting a composition for the rare-earth oxidelayer and for the metal oxide interruption layer of the plasma resistantprotective coating and by selecting a thickness for each of theselayers. The composition of the rare-earth oxide layer and thecomposition of the metal oxide interruption layer may be selected fromany of the materials contemplated hereinabove. The thickness selectedfor the rare-earth oxide layer and for the metal oxide interruptionlayer and the ratio among them may also be selected from any of thethicknesses and ratios contemplated hereinabove. The compositionselection, thickness selection, and method of forming may be performedby the same entity or by multiple entities.

At block 310, the article is loaded into an ALD or a CVD depositionchamber. The method comprises depositing a plasma resistant protectivecoating onto a surface of the article using ALD or CVD. In oneembodiment, at block 325 ALD or CVD is performed to deposit orco-deposit (for a multi-elemental layer) a rare-earth oxide layer. Therare-earth oxide layer may comprise yttrium oxide and have a cubiccrystalline phase in one embodiment. In one embodiment, at block 330 ALDor CVD is performed to deposit or co-deposit (for a multi-elementallayer) a metal oxide interruption layer. The metal oxide interruptionlayer may have an atomic crystalline phase different from the cubicphase of the crystalline rare-earth oxide layer. The metal oxideinterruption layer may be amorphous.

ALD and CVD are very conformal processes as performed in embodiments,which may cause the surface roughness of the plasma resistant protectivecoating to match a surface roughness of an underlying surface of thearticle that is coated. The plasma resistant protective coating may havea total thickness of about 500 nm to about 10 μm or about 500 nm toabout 5 μm in some embodiments. In other embodiments, the plasmaresistant protective coating may have a thickness of about 500 nm toabout 1 μm. The plasma resistant protective coating may have a porosityof about 0% in embodiments, or may be porosity-free in embodiments, andmay have a thickness variation across different sections of the coatingof about +/−5% or less, +/−10% or less, or +/−20% or less.

At block 335, a determination may be made as to whether additionallayers are to be added to the plasma resistant protective coating (e.g.,if a multi-layer stack is to be formed). If additional layers are to beadded, then the method may return to blocks 325-330 and an additionalrare-earth oxide layer and metal oxide interruption layer may be formedvia ALD or CVD. Otherwise the plasma resistant protective coating may befully formed and the method may reach its end.

Depending on the composition of the rare-earth oxide layer, block 325may comprise one or more cycles of ALD or CVD to deposit a rare-earthoxide with a target thickness. The target thickness of the rare-earthoxide layer may range from 500 angstroms to about 5000 angstroms. Insome embodiment, the rare-earth oxide layer may be a multi-elementalrare earth oxide layer. A multi-elemental rare earth oxide layer may bedeposited through sequential ALD or CVD deposition or throughco-deposition by co-injecting a plurality of precursors simultaneouslyinto a deposition chamber. The various ALD techniques are described inmore detail with respect to FIGS. 1A-1C and it is understood thatsimilar mechanisms may be utilized with a CVD process as well.

Similarly, depending on the composition of the metal oxide interruptionlayer, block 330 may comprise one or more cycles of ALD or CVD todeposit a metal oxide interruption layers with a target thickness. Thetarget thickness of a metal oxide interruption layer may range fromabout 1 angstrom to about 500 angstroms. In some embodiment, the metaloxide interruption layer may be a multi-elemental metal oxideinterruption layer. A multi-elemental metal oxide interruption layer maybe deposited through sequential ALD or CVD deposition or throughco-deposition by co-injecting a plurality of precursors simultaneouslyinto a deposition chamber. The various ALD techniques are described inmore detail with respect to FIGS. 1A-1C and it is understood thatsimilar mechanisms may be utilized with a CVD process as well.

The resistance of the coating material to plasma is measured through“etch rate” (ER), which may have units of micron/hour (μm/hr),throughout the duration of the coated components' operation and exposureto plasma. Measurements may be taken after different processing times.For example, measurements may be taken before processing, after 50processing hours, after 150 processing hours, after 200 processinghours, and so on. Variations in the composition of the plasma resistantprotective coating grown or deposited on the showerhead or on any otherprocess chamber component may result in multiple different plasmaresistances or erosion rate values. Additionally, a plasma resistantprotective coating with a single composition exposed to various plasmascould have multiple different plasma resistances or erosion rate values.For example, a plasma resistant material may have a first plasmaresistance or erosion rate associated with a first type of plasma and asecond plasma resistance or erosion rate associated with a second typeof plasma. In embodiments, no detectable erosion occurred after exposureto a 200 W NF₃ direct capacitive coupled plasma at 450° C. for 2 hours.

The following examples are set forth to assist in understanding theembodiments described herein and should not be construed as specificallylimiting the embodiments described and claimed herein. Such variations,including the substitution of all equivalents now known or laterdeveloped, which would be within the purview of those skilled in theart, and changes in formulation or minor changes in experimental design,are to be considered to fall within the scope of the embodimentsincorporated herein. These examples may be achieved by performing method300 described above.

Example 1

Forming a Y₂O₃ Plasma Resistant Protective Coating on an Al 6061Substrate and Al₂O₃ Buffer Layer with Intermittent ZrO₂ InterruptionLayers

FIG. 5A depicts a plasma resistant protective coating deposited on anAl₂O₃ buffer layer 520A that is deposited on an aluminum substrate of Al6061 510A. A rare-earth oxide layer 530A of crystalline yttrium oxidewas deposited on the aluminum oxide buffer layer using atomic layerdeposition. The deposition of the crystalline yttrium oxide layeroccurred by injecting a yttrium-containing precursor into the depositionchamber containing the article to cause the yttrium-containing precursorto adsorb onto the surface of the article to form a first half reaction.Thereafter, an oxygen-containing reactant may have been injected intothe deposition chamber to form a second half-reaction. This depositioncycle may have been repeated until the target thickness was obtained.

Subsequently, an interruption layer 540A of multiphase crystallinezirconium oxide layer was deposited on the single phase crystallineyttrium oxide layer using atomic layer deposition. The deposition of themultiphase crystalline zirconium oxide layer occurred by injecting ametal-containing precursor (e.g., zirconium-containing precursor) intothe deposition chamber containing the article to cause themetal-containing precursor (e.g., zirconium-containing precursor) toadsorb onto the surface of the article to form a first half reaction.Thereafter, an oxygen-containing reactant may have been injected intothe deposition chamber to form a second half-reaction. This depositioncycle may have been repeated until the target thickness was obtained.

These depositions were repeated for several cycles to form a stack ofalternating layers of single phase crystalline yttrium oxide layers(530A, 550A, 570A, 590A) and multiphase crystalline zirconium oxidelayers (540A, 560A, 580A).

The first layer 530A in the plasma resistant protective coating was asingle phase crystalline yttrium oxide layer. The crystalline yttriumoxide layers had about 95-100 wt % cubic phase corresponding to a PowderDiffraction File (PDF) No. 04-005-4378. The single phase crystallineyttrium oxide layers demonstrated an X-Ray Diffraction (XRD) profile asdepicted in FIG. 6A.

The intermittent zirconium oxide layers in the plasma resistantprotective coating were multiphase crystalline with about 65.1±5 wt % ofa tetragonal crystalline phase (also referred to as Tazheranite) andabout 34.9±5 wt % of a monoclinic crystalline phase (also referred to asBaddeleyite). The tetragonal crystalline phase of zirconia correspondsto a PDF No. 01-070-8758. The monoclinic crystalline phase of zirconiacorresponds to a PDF No. 01-070-8739. The multiphase crystallinezirconium oxide layers demonstrated an XRD profile as depicted in FIG.6B.

The thickness of the each of the rare earth oxide layers (i.e., thecrystalline yttrium oxide layers) was about 240 nm to about 260 nm andthe thickness of the interruption layers (i.e., the multiphasecrystalline zirconium oxide layers) was about 0.5 nm to about 1.5 nm.

The zirconium oxide interruption layers in the plasma resistantprotective coating were characterized using inter alia TransmissionElectron Microscopy and Energy Dispersive Spectroscopy (TEM/EDS) linescan. For analysis via TEM/EDS, the interruption layer of multiphasecrystalline zirconium oxide was deposited with a thickness that wassufficient to generate the atomic distribution of the various atoms inthe layer. The line scan is depicted in FIG. 6C. Concentrations ofoxygen 605, zirconium 625, and aluminum 632 are called out. Thecomposition demonstrated between 20 nm and 60 nm in the line scancorresponds to the composition of the multiphase crystalline zirconiumoxide interruption layer. FIG. 6C illustrates that the multiphasecrystalline zirconium oxide interruption layer comprises about 25 atomic% of zirconium and about 75 atomic % of oxygen.

FIG. 6D depicts a high Angle Annular Dark Field (HAADF) ScanningTransmission Electron Microscopy (STEM) image of the multiphasecrystalline zirconium oxide interruption layer that was analyzed viaTEM/EDS in FIG. 6C. Region 610 depicts Al6061, region 620 depicts thealumina buffer layer, and region 630 depicts the exemplary multiphasecrystalline zirconium oxide interruption layer that was analyzed viaTEM/EDS in FIG. 6C. FIG. 6D also shows that the multiphase crystallinezirconium oxide layer deposited by ALD covers the Al6061 and aluminabuffer layer conformally and uniformly with low to no porosity.

Example 2

Forming a Y₂O₃ Plasma Resistant Protective Coating on an Al 6061Substrate and Al₂O₃ Buffer Layer with Intermittent Y_(x)Zr_(y)O_(z)Interruption Layers

FIG. 5B depicts a plasma resistant protective coating deposited on anAl₂O₃ buffer layer 520B that is deposited on an aluminum substrate of Al6061 510B. A rare-earth oxide layer 530B of crystalline yttrium oxidewas deposited on the aluminum oxide buffer layer using atomic layerdeposition. Subsequently, an interruption layer 540B of crystallinezirconium yttrium oxide layer (e.g., a solid solution of Y₂O₃-ZrO₂) wasdeposited on the crystalline yttrium oxide layer using atomic layerdeposition. The crystalline yttrium oxide layer and crystallinezirconium yttrium oxide layer may have been deposited in a mannersimilar to that described in Example 1.

Interruption layer 540B was deposited through sequential atomic layerdeposition. Specifically, one cycle of zirconium oxide was deposited viaatomic layer deposition, followed by one cycle of yttrium oxidedeposited via atomic layer deposition. These two cycles (one cycle ofZrO₂ and one cycle of Y₂O₃) will be together referred to as asupercycle. Interruption layer 540B was fully grown after 4 supercycles.

The depositions of the single phase crystalline yttrium oxide layer andsingle phase crystalline zirconium yttrium oxide interruption layerswere repeated for several cycles to form a stack of alternating layersof crystalline yttrium oxide layers (530B, 550B, 570B, 590B) andcrystalline zirconium yttrium oxide layers (540B, 560B, 580B).

The first layer 530B in the plasma resistant protective coating was asingle phase crystalline yttrium oxide layer. The single phasecrystalline yttrium oxide layers had an about 95-100 wt % cubic phasecorresponding to a Powder Diffraction File (PDF) No. 04-005-4378. Thesingle phase crystalline yttrium oxide layers demonstrated an X-RayDiffraction (XRD) profile as depicted in FIG. 6A.

The intermittent zirconium yttrium oxide layers in the plasma resistantprotective coating were single phase crystalline with about 95-100 wt %tetragonal crystalline phase. The tetragonal crystalline phase ofzirconium yttrium oxide corresponds to a PDF No. 01-082-1243. Thecrystalline zirconium yttrium oxide layers demonstrated an XRD profileas depicted in FIG. 7A. The XRD profile depicted in FIG. 7A and thecorresponding PDF No. correlate with Zr_(0.86)Y_(0.14)O_(1.93) chemicalformula.

The thickness of the each of the rare earth oxide layers (i.e., thecrystalline yttrium oxide layers) was about 240 nm to about 260 nm andthe thickness of the interruption layers (i.e., the crystallinezirconium yttrium oxide layers) was about 0.5 nm to about 1.5 nm, orabout 0.8 nm.

The zirconium yttrium oxide interruption layers in the plasma resistantprotective coating were characterized using inter alia TransmissionElectron Microscopy and Energy Dispersive Spectroscopy (TEM/EDS) linescan. For analysis via TEM/EDS, the interruption layer of crystallinezirconium yttrium oxide was deposited with a thickness that wassufficient to generate the atomic distribution of the various atoms inthe layer. The line scan is depicted in FIG. 7B. Concentrations ofoxygen 705, yttrium 712, zirconium 725, aluminum 732, and iridium 745are called out. The composition demonstrated between 40 nm and 90 nm inthe line scan corresponds to the composition of the crystallinezirconium yttrium oxide interruption layer. FIG. 7B illustrates that thecrystalline zirconium yttrium oxide interruption layer comprises about10-15 atomic % of yttrium, about of 20-25 atomic % of zirconium andabout 60-65 atomic % of oxygen.

FIG. 7C depicts a high Angle Annular Dark Field (HAADF) ScanningTransmission Electron Microscopy (STEM) image of the crystallinezirconium yttrium oxide interruption layer that was analyzed via TEM/EDSin FIG. 7B. Region 710 depicts Al6061, region 720 depicts the aluminabuffer layer, and region 730 depicts the exemplary multiphasecrystalline zirconium oxide interruption layer that was analyzed viaTEM/EDS in FIG. 7B. FIG. 7C also shows that the crystalline zirconiumyttrium oxide layer deposited by ALD covers the Al6061 and aluminabuffer layer conformally and uniformly with low to no porosity.

FIGS. 7D and 7E depicts Transmission Electron Microscopy (TEM) images ofa crystalline zirconium yttrium oxide layer and further demonstrate theconformal, uniform, and porosity free coating obtained through atomiclayer deposition.

Example 3

Forming a Y₂O₃ Plasma Resistant Protective Coating on an Al 6061Substrate and Al₂O₃ Buffer Layer with Intermittent Y_(x)Zr_(y)O_(z)Interruption Layers

FIG. 5C depicts a plasma resistant protective coating deposited on anAl₂O₃ buffer layer 520C that is deposited on an aluminum substrate of Al6061 510C. A rare-earth oxide layer 530C of single phase crystallineyttrium oxide was deposited on the aluminum oxide buffer layer usingatomic layer deposition. Subsequently, an interruption layer 540C of amixed multiphase crystalline yttrium zirconium oxide (e.g., a Y₂O₃—ZrO₂solid solution) and yttrium oxide layer was deposited on the singlephase crystalline yttrium oxide layer using atomic layer deposition. Thesingle phase crystalline yttrium oxide layer and multiphase crystallineyttrium zirconium oxide interruption layer may have been deposited in amanner similar to that described in Example 1.

Interruption layer 540C was deposited through sequential atomic layerdeposition. Specifically, one cycle of zirconium oxide was deposited viaatomic layer deposition, followed by two cycles of yttrium oxidedeposited via atomic layer deposition. These three cycles (one cycle ofZrO₂ and two cycle of Y₂O₃) will be together referred to in this exampleas a supercycle. Interruption layer 540C was fully grown after 4supercycles.

The depositions of the single phase crystalline yttrium oxide layer andmultiphase crystalline mix of yttrium zirconium oxide and yttrium oxideinterruption layers were repeated for several cycles to form a stack ofalternating layers of single phase crystalline yttrium oxide layers(530C, 550C, 570C, 590C) and multiphase crystalline of yttrium zirconiumoxide and yttrium oxide (540C, 560C, 580C).

The first layer 530C in the plasma resistant protective coating was asingle phase crystalline yttrium oxide layer. The single phasecrystalline yttrium oxide layers had an about 95-100 wt % cubic phasecorresponding to a Powder Diffraction File (PDF) No. 04-005-4378. Thesingle phase crystalline yttrium oxide layers demonstrated an X-RayDiffraction (XRD) profile as depicted in FIG. 6A.

The intermittent mix of yttrium zirconium oxide and yttrium oxide layersin the plasma resistant protective coating were multiphase crystallinewith an about 64-74 wt %, or about 69.4 wt % cubic crystalline phase(corresponding to a PDF No. 01-080-4014) and about 25-35 wt %, or about30.6 wt % cubic yttrium oxide phase (corresponding to a PDF No.01-084-3893). The multiphase crystalline interruption layersdemonstrated an XRD profile as depicted in FIG. 8A. The XRD profiledepicted in FIG. 8A and the corresponding PDF Numbers correlate withabout 69.4±5 wt % Zr_(0.4)Y_(0.6)O_(1.7) chemical formula and about30.6±5 wt % Y₂O₃ chemical formula. Although the phases of the yttriumzirconium oxide and yttrium oxide are cubic and the phase of the yttriumoxide rare-earth oxide layer is also cubic, the lattice structure of thevarious cubic phases are different. Thus, the interruption layer mayhave the same phase as the rare-earth oxide layer as long as the latticestructure of the two crystalline phases vary.

The thickness of the each of the rare earth oxide layers (i.e., thecrystalline yttrium oxide layers) was about 240 nm to about 260 nm andthe thickness of the interruption layers (i.e., the multiphasecrystalline mix of yttrium zirconium oxide and yttrium oxide layers) wasabout 0.5 nm to about 1.5 nm, or about 1.2 nm.

The interruption layers in the plasma resistant protective coating werecharacterized using inter alia Transmission Electron Microscopy andEnergy Dispersive Spectroscopy (TEM/EDS) line scan. For analysis viaTEM/EDS, the interruption layer of multiphase crystalline mix of yttriumzirconium oxide and yttrium oxide was deposited with a thickness thatwas sufficient to generate the atomic distribution of the various atomsin the layer. The line scan is depicted in FIG. 8B. Concentrations ofoxygen 805, yttrium 812, zirconium 825, aluminum 832, and iridium 845are called out. The composition demonstrated between 30 nm and 480 nm inthe line scan corresponds to the composition of the multiphasecrystalline mix of yttrium zirconium oxide and yttrium oxideinterruption layer. FIG. 8B illustrates that the multiphase crystallinemix of yttrium zirconium oxide and yttrium oxide interruption layercomprises about 15-25 atomic % of yttrium, about of 5-10 atomic % ofzirconium and about 65-75 atomic % of oxygen.

FIG. 8C depicts a high Angle Annular Dark Field (HAADF) ScanningTransmission Electron Microscopy (STEM) image of the multiphasecrystalline mix of yttrium zirconium oxide and yttrium oxideinterruption layer that was analyzed via TEM/EDS in FIG. 8B. Region 815depicts Al6061 and region 835 depicts the exemplary multiphasecrystalline mix of yttrium zirconium oxide and yttrium oxideinterruption layer that was analyzed via TEM/EDS in FIG. 8B. FIG. 8Calso shows that the multiphase crystalline mix of yttrium zirconiumoxide and yttrium oxide layer deposited by ALD covers the Al6061 andalumina buffer layer conformally and uniformly with low to no porosity.

FIG. 8D depicts Transmission Electron Microscopy (TEM) images of amultiphase crystalline mix of yttrium zirconium oxide and yttrium oxideinterruption layer and further demonstrates the conformal, uniform, andporosity free coating obtained through atomic layer deposition.

Example 4

Forming a Y₂O₃ Plasma Resistant Protective Coating on an Al 6061Substrate and Al₂O₃ Buffer Layer with Intermittent Y_(x)Zr_(y)O_(z)Interruption Layers

FIG. 9A depicts a plasma resistant protective coating deposited on anAl₂O₃ buffer layer 920 that is deposited on an aluminum substrate of Al6061 910. A rare-earth oxide layer 930 of single phase crystallineyttrium oxide was deposited on the aluminum oxide buffer layer usingatomic layer deposition. Subsequently, an interruption layer 940 of amixed multiphase crystalline yttrium zirconium oxide and yttrium oxidelayer was deposited on the single phase crystalline yttrium oxide layerusing atomic layer deposition. The single phase crystalline yttriumoxide layer and multiphase crystalline yttrium zirconium oxideinterruption layer may have been deposited in a manner similar to thatdescribed in Example 1.

Interruption layer 940 was deposited through sequential atomic layerdeposition. Specifically, one cycle of zirconium oxide was deposited viaatomic layer deposition, followed by three cycles of yttrium oxidedeposited via atomic layer deposition. These four cycles (one cycle ofZrO₂ and three cycle of Y₂O₃) will be together referred to in thisexample as a supercycle. Interruption layer 940 was fully grown after 4supercycles.

The depositions of the single phase crystalline yttrium oxide layer andmultiphase crystalline mix of yttrium zirconium oxide and yttrium oxideinterruption layers were repeated for several cycles to form a stack ofalternating layers of single phase crystalline yttrium oxide layers(930, 950, 970, 990) and multiphase crystalline mix of yttrium zirconiumoxide and yttrium oxide layers (940, 960, 980).

The first layer 930 in the plasma resistant protective coating was asingle phase crystalline yttrium oxide layer. The single phasecrystalline yttrium oxide layers had an about 95-100 wt % cubic phasecorresponding to a Powder Diffraction File (PDF) No. 04-005-4378. Thesingle phase crystalline yttrium oxide layers demonstrated an X-RayDiffraction (XRD) profile as depicted in FIG. 6A.

The intermittent mix of yttrium zirconium oxide and yttrium oxide layersin the plasma resistant protective coating were multiphase crystallinewith an about 25-35 wt %, or about 30.8 wt % cubic crystalline phase(corresponding to a PDF No. 01-080-4014) and about 64-74 wt %, or about69.2 wt % cubic yttrium oxide phase (corresponding to a PDF No.01-084-3893). The multiphase crystalline interruption layersdemonstrated an XRD profile as depicted in FIG. 8A. The XRD profiledepicted in FIG. 8A and the corresponding PDF Numbers correlate withabout 30.8±5 wt % Zr_(0.4)Y_(0.6)O_(1.7) (i.e., x is 0.6, y is 0.4, andz is 1.7) is chemical formula and about 69.2±5 wt % Y₂O₃ chemicalformula. Although the phases of the yttrium zirconium oxide and yttriumoxide are cubic and the phase of the yttrium oxide rare-earth oxidelayer is also cubic, the lattice structure of the various cubic phasesare different. Thus, the interruption layer may have the same phase asthe rare-earth oxide layer as long as the lattice structure of the twocrystalline phases vary.

Although x, y, and z in the chemical formula Y_(x)Zr_(y)O_(z) areidentified in this example and in the prior example, their values shouldnot be construed as limited and the atomic ratio of yttrium to zirconiumcan range from 0 (when no yttrium is present) to 9, so long as theresultant crystalline phase(s) is/are different from the crystallinephase(s) of the rare-earth oxide layer.

The thickness of the each of the rare earth oxide layers (i.e., thecrystalline yttrium oxide layers) was about 240 nm to about 260 nm andthe thickness of the interruption layers (i.e., the multiphasecrystalline mix of yttrium zirconium oxide and yttrium oxide layers) wasabout 0.5 nm to about 2.0 nm, or about 1.6 nm.

The interruption layers in the plasma resistant protective coating werecharacterized using inter alia Transmission Electron Microscopy andEnergy Dispersive Spectroscopy (TEM/EDS) line scan. For analysis viaTEM/EDS, the interruption layer of multiphase crystalline mix of yttriumzirconium oxide and yttrium oxide was deposited with a thickness thatwas sufficient to generate the atomic distribution of the various atomsin the layer. The line scan is depicted in FIG. 9B. Concentrations ofoxygen 905, yttrium 912, zirconium 925, aluminum 932, and iridium 945are called out. The composition demonstrated between 40 nm and 85 nm inthe line scan corresponds to the composition of the multiphasecrystalline mix of yttrium zirconium oxide and yttrium oxideinterruption layer. FIG. 9B illustrates that the multiphase crystallinemix of yttrium zirconium oxide and yttrium oxide interruption layercomprises about 3-7 atomic % of zirconium, about of 15-25 atomic % ofzirconium and about 65-75 atomic % of oxygen.

FIG. 9C depicts a high Angle Annular Dark Field (HAADF) ScanningTransmission Electron Microscopy (STEM) image of the multiphasecrystalline mix of yttrium zirconium oxide and yttrium oxideinterruption layer that was analyzed via TEM/EDS in FIG. 9B. Region 915depicts Al6061 and region 935 depicts the exemplary multiphasecrystalline mix of yttrium zirconium oxide and yttrium oxideinterruption layer that was analyzed via TEM/EDS in FIG. 9B. FIG. 9Calso shows that the multiphase crystalline mix of yttrium zirconiumoxide and yttrium oxide layer deposited by ALD covers the Al6061 andalumina buffer layer conformally and uniformly with low to no porosity.

FIG. 9D depicts Transmission Electron Microscopy (TEM) images of amultiphase crystalline mix of yttrium zirconium oxide and yttrium oxideinterruption layer and further demonstrates the conformal, uniform, andporosity free coating obtained through atomic layer deposition.

Example 5

Forming a Y₂O₃ Plasma Resistant Protective Coating on an Al 6061Substrate and Al₂O₃ Buffer Layer with Intermittent Gadolinium OxideInterruption Layers

FIG. 10 depicts a plasma resistant protective coating deposited on anAl₂O₃ buffer layer 1020 that is deposited on an aluminum substrate of Al6061 1010. A rare-earth oxide layer 1030 of single phase crystallineyttrium oxide was deposited on the aluminum oxide buffer layer usingatomic layer deposition. Subsequently, an interruption layer 1040 ofgadolinium oxide was deposited on the single phase crystalline yttriumoxide layer using atomic layer deposition.

The depositions of the single phase crystalline yttrium oxide layer andsingle/multi-phase crystalline gadolinium oxide interruption layers wererepeated for several cycles to form a stack of alternating layers ofcrystalline yttrium oxide layers (1030, 1050, 1070, 1090) and ofcrystalline gadolinium oxide layers (1040, 1060, 1080).

Similar to the crystalline gadolinium oxide interruption layers, otheramorphous or crystalline rare-earth oxide interruption layers may bedeposited between layers yttrium oxide. When the interruption layer iscrystalline, the atomic crystalline phase(s) of the interruption layershould be different from the atomic crystalline phase of the yttriumoxide or at least have a different lattice structure. Dissimilarcrystalline phases or dissimilar lattice structures allow theinterruption layers to inhibit the growth of the yttrium oxide grainsfrom growing uncontrollably and abnormally large.

Exemplary, non-limiting, crystalline phases associated with variousrare-earth oxides are depicted in FIG. 3 (e.g., La₂O₃, Pr₂O₃, Nd₂O₃,Sm₂O₃, Eu₂O₃, Gd₂O₃, Tb₂O₃, Dy₂O₃, Ho₂O₃, Er₂O₃, Tm₂O₃, Yb₂O₃, ZrO₂, andcombinations thereof). In FIG. 3, where the y axis representstemperature and the x axis represents the rare-earth oxide, it ispossible to identify what crystalline single phase or multiphase phase aparticular rare-earth oxide will exist in when subjected to a particulartemperature. For instance, at certain ALD temperatures La₂O₃, Pr₂O₃,Nd₂O₃ may have a hexagonal crystalline atomic phase; Sm₂O₃ may have ahexagonal and/or a monoclinic crystalline phase; Eu₂O₃, Gd₂O₃, Tb₂O₃ mayexist in a monoclinic crystalline phase; Dy₂O₃ may exist in a monoclinicand/or cubic crystalline phase; and Ho₂O₃, Er₂O₂, Tm₂O₃, Yb₂O₃ may existin a cubic crystalline phase. In some embodiments, the crystalline metaloxide layer may comprise YAG in the cubic phase. As shown, region Aincludes a rare earth oxide type A structure, which is a hexagonalcrystal structure. Region B includes a rare earth oxide type Bstructure, which is a monoclinic crystal structure. Region C includes arare earth oxide type C structure, which is a cubic crystal structure.Region H incudes a rare earth type H structure, which is a hexagonalcrystal structure. Region X includes a rare earth oxide type Xstructure, which is a cubic crystal structure. As shown, Er2O3 possessesa cubic structure.

Example 6

Forming a Y₂O₃ Plasma Resistant Protective Coating on an Al 6061Substrate and Al₂O₃ Buffer Layer with Intermittent Y_(x)Zr_(y)O_(z)Interruption Layers

FIG. 12 depicts a plasma resistant protective coating deposited on anAl₂O₃ buffer layer 1220 that is deposited on an aluminum substrate of Al6061 1210. A rare-earth oxide layer 1230 of single phase crystallineyttrium oxide was deposited on the aluminum oxide buffer layer usingatomic layer deposition. Subsequently, an interruption layer 1240 ofyttrium zirconium oxide was deposited on the single phase crystallineyttrium oxide layer using atomic layer deposition. The single phasecrystalline yttrium oxide layer and yttrium zirconium oxide interruptionlayer may have been deposited in a manner similar to that described inExample 1.

Interruption layer 1240 was deposited through sequential atomic layerdeposition. Specifically, three cycles of zirconium oxide was depositedvia atomic layer deposition, followed by one cycle of yttrium oxidedeposited via atomic layer deposition. These four cycles (three cyclesof ZrO₂ and one cycle of Y₂O₃) will be together referred to in thisexample as a supercycle. Interruption layer 1240 was fully grown after 4supercycles.

The depositions of the single phase crystalline yttrium oxide layer andyttrium zirconium oxide interruption layers were repeated for severalcycles to form a stack of alternating layers of single phase crystallineyttrium oxide layers (1230, 1250, 1270, 1290) and yttrium zirconiumoxide (1240, 1260, 1280).

The first layer 1230 in the plasma resistant protective coating was asingle phase crystalline yttrium oxide layer. The single phasecrystalline yttrium oxide layers had an about 95-100 wt % cubic phasecorresponding to a Powder Diffraction File (PDF) No. 04-005-4378. Thesingle phase crystalline yttrium oxide layers demonstrated an X-RayDiffraction (XRD) profile as depicted in FIG. 6A.

The thickness of the each of the rare earth oxide layers (i.e., thecrystalline yttrium oxide layers) was about 240 nm to about 260 nm andthe thickness of the interruption layers was about 0.5 nm to about 2.0nm, or about 1.6 nm.

The interruption layers in the plasma resistant protective coating werecharacterized using inter alia top down Scanning Electron Microscopy(SEM) image, TEM image, and TEM/EDS line scan.

The top down SEM images are depicted in FIG. 13A and FIG. 13B. FIG. 13Ashows a top down SEM image of a 1 μm yttria coating deposited by ALDwithout an interruption layer. As shown in FIG. 13A, overgrown grains1305 protrude out of the surface coating. Region 1308 shows a cutlocation (e.g., a focused ion beam (FIB) cut location) for TEM. FIG. 13Bshows a top down SEM image of a 1 μm yttria coating with interruptionlayers in accordance with the instant example. As shown in FIG. 13B, noovergrown grains protrude from the surface of the coating. Region 1310shows a cut location (e.g., a focused ion beam (FIB) cut location) forTEM.

Cross sectional TEM images are depicted in FIG. 14A and FIG. 14B. FIG.14A shows a cross sectional TEM image of a 1 μm yttria coating depositedby ALD without an interruption layer. FIG. 14A shows a TEM of a sampletaken from cut location 1308. As shown in FIG. 14A, an overgrown grain1405 protrudes out of the surface of the coating. FIG. 14B shows a crosssectional TEM image of a 1 μm yttria coating with interruption layers inaccordance with the instant example. FIG. 14B shows a TEM of a sampletaken from cut location 1310. As shown in FIG. 14B, no overgrown grainsprotrude from the surface of the coating.

TEM/EDS line scans are depicted in FIG. 15A and FIG. 15B. The line scanis depicted in FIG. 15A. The TEM/EDS line scan shows an Al substrate1502 covered by a coating 1504, which is in turn covered by a FIB caplayer 1506. The composition demonstrated three zirconium peaks betweenabout 250-350 nm, between about 500-600 nm, and between about 750-850 nm(i.e., in the locations of the interruption layers).

FIG. 15B depicts a TEM image which shows the three interruption layers1505, 1510, 1515 identified in the line scan (each shown as a zirconiumpeak) and further demonstrates the conformal, uniform, and porosity freecoating obtained through atomic layer deposition.

All interruption layers discussed and exemplified herein only inhibituncontrolled grain growth of the grains in the crystalline rare-earthoxide layers. The interruption layers do not affect the crystallinephase of the rare-earth oxide layers.

XRD data presented herein was acquired by grazing incidence XRD (GIXRD)on a PANalytical X'Pert Pro MRD 6-axis diffractometer equipped with acopper X-ray tube and parallel beam optics.

TEM samples were prepared using the in situ Focused Ion Beam (FIB) liftout technique on an FEI Helios 650 Dual Beam FIB/SEM. The samples werecapped with sputtered Irdium (Ir), protective carbon ink, and e-Pt/I-Ptprior to milling. The TEM lamella thickness was ˜100 nm.

TEM samples were imaged with a FEI Tecnai TF-20 FEG/TEM operated at 200kV in bright-field (BF) TEM mode, high-resolution (HR) TEM mode.

Z-contrast STEM is a form of Rutherford Scattering in which electronsare scattered to very large angles and are collected with a specialdetector. The scattering goes as Z2 and the resulting image can bedirectly interpreted as qualitative chemical map. The image contrast isdue to differences in the average atomic mass; with heavier atomicmasses appearing brighter than lighter average atomic masses. There istypically very little diffraction contrast in these images. These imagesare sometimes referred to as High Angle Annular Dark Field images(HAADF). “Z Contrast” can show atomic columns in the highest resolutionimages.

The preceding description sets forth numerous specific details such asexamples of specific systems, components, methods, and so forth, inorder to provide a good understanding of several embodiments of thepresent invention. It will be apparent to one skilled in the art,however, that at least some embodiments of the present invention may bepracticed without these specific details. In other instances, well-knowncomponents or methods are not described in detail or are presented insimple block diagram format in order to avoid unnecessarily obscuringthe present invention. Thus, the specific details set forth are merelyexemplary. Particular embodiments may vary from these exemplary detailsand still be contemplated to be within the scope of the presentinvention.

Reference throughout this specification to “one embodiment” or “anembodiment” means that a particular feature, structure, orcharacteristic described in connection with the embodiment is includedin at least one embodiment. Thus, the appearances of the phrase “in oneembodiment” or “in an embodiment” in various places throughout thisspecification are not necessarily all referring to the same embodiment.In addition, the term “or” is intended to mean an inclusive “or” ratherthan an exclusive “or.”

Reference throughout this specification to numerical ranges should notbe construed as limiting and should be understood as encompassing theouter limits of the range as well as each number and/or narrower rangewithin the enumerated numerical range.

Although the operations of the methods herein are shown and described ina particular order, the order of the operations of each method may bealtered so that certain operations may be performed in an inverse orderor so that certain operation may be performed, at least in part,concurrently with other operations. In another embodiment, instructionsor sub-operations of distinct operations may be in an intermittentand/or alternating manner.

It is to be understood that the above description is intended to beillustrative, and not restrictive. Many other embodiments will beapparent to those of skill in the art upon reading and understanding theabove description. The scope of the invention should, therefore, bedetermined with reference to the appended claims, along with the fullscope of equivalents to which such claims are entitled.

What is claimed is:
 1. An article comprising a plasma resistantprotective coating on a surface of the article, wherein the plasmaresistant protective coating comprises: a stack of alternating layers ofcrystalline rare-earth oxide layers and crystalline or amorphous metaloxide layers, wherein: a first layer in the stack of alternating layersis a crystalline rare-earth oxide layer, the crystalline rare-earthoxide layers have a thickness of about 500-5000 angstroms, when themetal oxide layers are crystalline, the metal oxide layers have anatomic crystalline phase different from the phase of the crystallinerare-earth oxide layers, the metal oxide layers have a thickness ofabout 1-500 angstroms, and the crystalline or amorphous metal oxidelayers inhibit grain growth of the crystalline rare-earth oxide layers.2. The article of claim 1, wherein the crystalline or amorphous metaloxide layer is selected from the group consisting of one or more rareearth metal- containing oxides, zirconium oxide, aluminum oxide, andmixtures thereof, and wherein the crystalline rare-earth oxide layercomprises crystalline yttrium oxide in a cubic phase.
 3. The article ofclaim 2, wherein the one or more rare earth metal-containing oxides areselected from the group consisting of lanthanum oxide, praseodymiumoxide, neodymium oxide, samarium oxide, europium oxide, gadoliniumoxide, terbium oxide, dysprosium oxide, holmium oxide, erbium oxide,thulium oxide, ytterbium oxide, and mixtures thereof.
 4. The article ofclaim 1, wherein the atomic crystalline phase different from the phaseof the crystalline rare-earth oxide is selected from the groupconsisting of hexagonal phase, monoclinic phase, cubic phase, hexagonalphase, tetragonal phase, and combinations thereof.
 5. The article ofclaim 2, wherein the crystalline yttrium oxide layer comprises grainshaving a size that is up to the thickness of the crystalline yttriumoxide layer.
 6. The article of claim 1, wherein the plasma resistantprotective coating has a thickness ranging from about 500 nm to about 10μm, and wherein the plasma resistant protective coating is uniform,conformal, and porosity-free.
 7. The article of claim 1, wherein thearticle is a chamber component selected from the group consisting of: anelectrostatic chuck, a nozzle, a gas distribution plate, a showerhead,an electrostatic chuck component, a chamber wall, a liner, a liner kit,a gas line, a lid, a chamber lid, a nozzle, a single ring, a processingkit ring, a base, a shield, a plasma screen, a flow equalizer, a coolingbase, a chamber viewport, a bellow, a faceplate, and selectivitymodulating device.
 8. The article of claim 1, wherein the metal oxidelayer is crystalline and is selected from the group consisting of: acomposition ranging from a pure crystalline single phase zirconia in atleast one of a tetragonal phase or a monoclinic phase to a crystallinemultiphase or a crystalline single phase yttrium zirconium oxide with anatomic percentage of zirconium of about 5%, based on the total atoms inthe composition; a mixture of about 65 wt % of zirconium oxide in atetragonal phase and about 35 wt % of zirconium oxide in a monoclinicphase; about 100 wt % multi-elemental oxide of zirconium yttrium oxidein a tetragonal phase; a mixture of about 70 wt % of a multi-elementaloxide of zirconium yttrium oxide in a first cubic phase and about 30 wt% of yttrium oxide in a second cubic phase, wherein the first cubicphase and the second cubic phase have a lattice structure that isdifferent from the lattice structure of the crystalline yttrium oxidelayer; and a mixture of about 30 wt % of a multi-elemental oxide ofzirconium yttrium oxide in the first cubic phase and about 70 wt % ofyttrium oxide in the second cubic phase. 9-20. (canceled)
 21. Thearticle of claim 1, wherein the thickness of the crystalline oramorphous metal oxide layer is lower than the thickness of thecrystalline rare-earth oxide layer.
 22. The article of claim 1, whereina thickness ratio of thickness of the crystalline rare-earth oxide layerto thickness of the crystalline or amorphous metal oxide layer is about10:1 to about 500:1.
 23. The article of claim 1, wherein the thecrystalline or amorphous metal oxide layers inhibit grain growth of thecrystalline rare-earth oxide layers such that all grains in thecrystalline rare-earth oxide layers have a grain size that is below 100nm in length and that is below 200 nm in width.